
TDI Workbench: Deep-UV 8K TDI Scanning, Gigapixel Stitching and 3D
Software for a deep-UV (265 nm) 8K TDI inspection station: one interactive GUI controls the camera, frame grabbers, a 1 nm-resolution XYZ stage and five UV light channels, then stitches gigapixel images and reconstructs the 3D surface.

















